Low Temperature Oxidation of Sn Film by NF3/O2 Plasma

Journal of the Ceramic Association Japan 1987 Vol. 95; Iss. 1102

Low Temperature Oxidation of Sn Film by NF3/O2 Plasma

KOINUMA, Hideomi, KAWASAKI, Masashi, MASUBUCHI, Kiyomi, FUEKI, Kazuo
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Volume:
95
Year:
1987
Language:
english
Journal:
Journal of the Ceramic Association, Japan
DOI:
10.2109/jcersj1950.95.1102_569
File:
PDF, 1.07 MB
english, 1987
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