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Fabrication of a porous alumina mask on the large surface area of a semi-insulating semiconductor substrate
TAKIZAWA, Chieko, KATO, Seiichi, GOTO, Atsushi, KITAZAWA, Hideaki, IKEDA, Naoki, SUGIMOTO, YoshimasaVolume:
121
Year:
2013
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj2.121.516
File:
PDF, 1.33 MB
english, 2013