Structure of Ultra-Thin Diamond-Like Carbon Films Grown...

Analytical Sciences 2010 Vol. 26; Iss. 2

Structure of Ultra-Thin Diamond-Like Carbon Films Grown with Filtered Cathodic Arc on Si(001)

HERRERA-GOMEZ, Alberto, SUN, Yongjian, AGUIRRE-TOSTADO, Francisco-Servando, HWANG, Cherngye, MANI-GONZALEZ, Pierre-Giovanni, FLINT, Eric, ESPINOSA-MAGAÑA, Francisco, WALLACE, Robert M.
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Volume:
26
Year:
2010
Language:
english
Journal:
Analytical Sciences
DOI:
10.2116/analsci.26.267
File:
PDF, 1.39 MB
english, 2010
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