Optimal Airflow Performance for FOUP Systems in Cleanrooms...

Optimal Airflow Performance for FOUP Systems in Cleanrooms Using SVE Quantification Method

Suwa, Yoshihide, Park, Jin Chul, Kim, Yong-Shik
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Volume:
10
Year:
2011
Language:
english
Journal:
Journal of Asian Architecture and Building Engineering
DOI:
10.3130/jaabe.10.257
File:
PDF, 1.15 MB
english, 2011
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