Nanomechanical studies and materials characterization of...

International Journal of Materials Research (formerly Zeitschrift fuer Metallkunde) 2013 / 04 Vol. 104; Iss. 4

Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

Pustan, Marius, Dudescu, Cristian, Birleanu, Corina, Rymuza, Zygmunt
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Volume:
104
Language:
english
Journal:
International Journal of Materials Research
DOI:
10.3139/146.110879
Date:
April, 2013
File:
PDF, 345 KB
english, 2013
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