Proceedings of the 6th International Conference on Recrystallization and Grain Growth (ReX&GG 2016) || Textured Growth of AlN Films Deposited on Si(100) by DC Reactive Magnetron Sputtering and by High Power Impulse Magnetron Sputtering (HiPIMS)
Holm, Elizabeth A., Farjami, Susan, Manohar, Priyadarshan, Rohrer, Gregory S., Rollett, Anthony D., Srolovitz, David, Weiland, HassoVolume:
10.1007/97
Year:
2016
Language:
english
DOI:
10.1007/978-3-319-48770-0_44
File:
PDF, 193 KB
english, 2016