Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
Zywitzki, Olaf, Modes, Thomas, Barth, Stephan, Bartzsch, Hagen, Frach, PeterLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.11.083
Date:
November, 2016
File:
PDF, 1.60 MB
english, 2016