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Effect of a radiation shield on silicon CZ growth.
TSUKADA, TAKAO, IMAISHI, NOBUYUKI, HOZAWA, MITSUNORI, FUJINAWA, KATSUHIKOVolume:
20
Year:
1987
Language:
english
Journal:
Journal of Chemical Engineering of Japan
DOI:
10.1252/jcej.20.146
File:
PDF, 423 KB
english, 1987