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An Optical Method to Detect Amount of Particles Deposited on a Substrate.
Higashitani, Ko, Yasumura, Kimihiko, Maki, TakamasaVolume:
28
Year:
1995
Journal:
JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
DOI:
10.1252/jcej.28.501
File:
PDF, 583 KB
1995