Formation of carbon thin films using DC, AC sine, and AC...

Formation of carbon thin films using DC, AC sine, and AC rectangular wave glow discharge.

Takahashi, Ken, Kuroda, Atsuyuki, Kanzawa, Atsushi, Honda, Takuya
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Volume:
16
Year:
1990
Journal:
KAGAKU KOGAKU RONBUNSHU
DOI:
10.1252/kakoronbunshu.16.469
File:
PDF, 906 KB
1990
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