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Formation of carbon thin films using DC, AC sine, and AC rectangular wave glow discharge.
Takahashi, Ken, Kuroda, Atsuyuki, Kanzawa, Atsushi, Honda, TakuyaVolume:
16
Year:
1990
Journal:
KAGAKU KOGAKU RONBUNSHU
DOI:
10.1252/kakoronbunshu.16.469
File:
PDF, 906 KB
1990