Fabrication of the X-Ray Mask using the Silicon Dry Etching

Journal of Advanced Mechanical Design Systems and Manufacturing 2008 Vol. 2; Iss. 2

Fabrication of the X-Ray Mask using the Silicon Dry Etching

TSUJII, Hiroshi, SHIMADA, Kazuma, TANAKA, Makoto, YASHIRO, Wataru, NODA, Daiji, HATTORI, Tadashi
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Volume:
2
Year:
2008
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.2.246
File:
PDF, 1.16 MB
english, 2008
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