An improved scan mode in an electrostatic force microscope for surface profile measurement of micro-optics
JIA, Zhigang, HOSOBUCHI, Keiichiro, ITO, So, SHIMIZU, Yuki, GAO, WeiVolume:
8
Year:
2014
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.2014jamdsm0051
File:
PDF, 1.41 MB
english, 2014