A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges
KURISAKI, Yugo, SAWANO, Hiroshi, YOSHIOKA, Hayato, SHINNO, HidenoriVolume:
4
Year:
2010
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.4.976
File:
PDF, 894 KB
english, 2010