Prediction of Real Contact Area from Microtopography on CMP Pad
JEONG, Hobin, LEE, Hyunseop, CHOI, Sungha, LEE, Youngkyun, JEONG, HaedoVolume:
6
Year:
2012
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.6.113
File:
PDF, 1.83 MB
english, 2012