Optimizing Movement Sequences for Step-and-Scan Lithography...

Optimizing Movement Sequences for Step-and-Scan Lithography Equipment

SHINANO, Yuji, INUI, Nobuo, FUKAGAWA, Youzou, TAKAKURA, Noburu
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Volume:
7
Year:
2013
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.7.608
File:
PDF, 613 KB
english, 2013
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