Optimizing Movement Sequences for Step-and-Scan Lithography Equipment
SHINANO, Yuji, INUI, Nobuo, FUKAGAWA, Youzou, TAKAKURA, NoburuVolume:
7
Year:
2013
Language:
english
Journal:
Journal of Advanced Mechanical Design, Systems, and Manufacturing
DOI:
10.1299/jamdsm.7.608
File:
PDF, 613 KB
english, 2013