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Computational Analysis of a Spiral Vibrating Beam for the MEMS-Viscosity Sensor
CHOI, Seung Chol, YAMAMOTO, Yasuyuki, MATSUMOTO, Sohei, YAMAMOTO, TomokoVolume:
7
Year:
2013
Language:
english
Journal:
Journal of Computational Science and Technology
DOI:
10.1299/jcst.7.89
File:
PDF, 939 KB
english, 2013