Development of an Efficient Inverse Analysis Technique for Monitoring of Electroplating Current Density on Target Region in LSI Fabrication
KISHIMOTO, Yoshinao, KOBAYASHI, Yukiyoshi, OHTSUKA, ToshihisaVolume:
5
Year:
2011
Language:
english
Journal:
Journal of Solid Mechanics and Materials Engineering
DOI:
10.1299/jmmp.5.656
File:
PDF, 1.63 MB
english, 2011