Simulation of Structural Characteristics of Ceramic Coating...

Simulation of Structural Characteristics of Ceramic Coating Film Based on Modeling of Sputtering Process.

HOSHIDE, Toshihiko, IIZUKA, Takashi
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Volume:
41
Year:
1998
Journal:
JSME International Journal Series A
DOI:
10.1299/jsmea.41.25
File:
PDF, 857 KB
1998
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