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Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method
FUJIGAKI, Motoharu, MORIMOTO, Yoshiharu, YABE, MasatoVolume:
45
Year:
2002
Journal:
JSME International Journal Series A
DOI:
10.1299/jsmea.45.448
File:
PDF, 483 KB
2002