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Effects of Target Erosion on the Growth Rate of Films Fabricated by the Sputtering Method.
Nanbu, Kenichi, Morimoto, Tamotsu, Goto, YuichiVolume:
36
Year:
1993
Journal:
JSME International Journal Series B
DOI:
10.1299/jsmeb.36.313
File:
PDF, 826 KB
1993