Three-Dimensional Nanofabrication Utilizing Selective Etching of Silicon Induced by Focused Ion Beam Irradiation
KAWASEGI, Noritaka, MORITA, Noboru, YAMADA, Shigeru, TAKANO, Noboru, OYAMA, Tatsuo, ASHIDA, Kiwamu, TANIGUCHI, Jun, MIYAMOTO, IwaoVolume:
49
Year:
2006
Language:
english
Journal:
JSME International Journal Series C
DOI:
10.1299/jsmec.49.583
File:
PDF, 3.12 MB
english, 2006