Residual Stress Measurement in Silicon Substrates after Thermal Oxidation.
MIURA, Hideo, OHTA, Hiroyuki, SAKATA, Hiroshi, OKAMOTO, NoriakiVolume:
58
Year:
1992
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.58.902
File:
PDF, 746 KB
1992