X-Ray Stress Measurement of Aluminum Thin Films Sputtered...

X-Ray Stress Measurement of Aluminum Thin Films Sputtered on Silicon Wafers.

Tanaka, Keisuke, Ishihara, Keisaku
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Volume:
61
Year:
1995
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.61.1971
File:
PDF, 808 KB
1995
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