Recent Progress of Experimental and Measuring Technology....

Recent Progress of Experimental and Measuring Technology. Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method.

FUJIGAKI, Motoharu, MORIMOTO, Yoshiharu, YABE, Masato
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Volume:
67
Year:
2001
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.67.393
File:
PDF, 649 KB
2001
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