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Recent Progress of Experimental and Measuring Technology. Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method.
FUJIGAKI, Motoharu, MORIMOTO, Yoshiharu, YABE, MasatoVolume:
67
Year:
2001
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.67.393
File:
PDF, 649 KB
2001