Criteria of Crack Initiation at Edge of Interface between Thin Films in Opening and Sliding Modes for an Advanced LSI
SHIBUTANI, Tadahiro, TSURUGA, Tetsu, YU, Qiang, SHIRATORI, MasakiVolume:
69
Year:
2003
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.69.1368
File:
PDF, 849 KB
2003