Relation between Friction and Wear Properties and...

Relation between Friction and Wear Properties and Delamination Behavior of Amorphous SiC Film Coated by Helicon Sputtering

KATO, Masahiko, NAKASA, Keijiro, YAN, Xu, TANAKA, Kazuhiro
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Volume:
69
Year:
2003
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.69.1731
File:
PDF, 1.08 MB
2003
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