Relation between Friction and Wear Properties and Delamination Behavior of Amorphous SiC Film Coated by Helicon Sputtering
KATO, Masahiko, NAKASA, Keijiro, YAN, Xu, TANAKA, KazuhiroVolume:
69
Year:
2003
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.69.1731
File:
PDF, 1.08 MB
2003