Elementary and Structural Effects on Mechanical Properties...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 2003 Vol. 69; Iss. 679

Elementary and Structural Effects on Mechanical Properties of Silicon Incorporated Amorphous Hydrogenous Carbon Films.

ISONO, Yoshitada, TANIBUCHI, Takahito, TANAKA, Takeshi, TERAYAMA, Nobuyuki
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Volume:
69
Year:
2003
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.69.602
File:
PDF, 926 KB
2003
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