Dry Acoustic Microscopy for Non-Destructive Evaluation of Electronic Materials (Selection of a Solid Layer for High-Resolution Inspection)
TOHMYOH, Hironori, SAKA, MasumiVolume:
72
Year:
2006
Language:
english
Journal:
Transactions of the Japan Society of Mechanical Engineers Series A
DOI:
10.1299/kikaia.72.1832
File:
PDF, 1.35 MB
english, 2006