Fabrication of Micro-Structured Parts by Nano-Imprint...

Fabrication of Micro-Structured Parts by Nano-Imprint Lithography Sacrificial Plastic Mold Insert MIM Using Nano-Sized Copper Powder

NISHIYABU, Kazuaki, TANABE, Daiki, KANOKO, Yasuhiro, TANAKA, Shigeo
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Volume:
77
Year:
2011
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
DOI:
10.1299/kikaia.77.1378
File:
PDF, 2.17 MB
2011
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