![](/img/cover-not-exists.png)
Effect of Surface Morphology and Crystal Orientations on Tensile Fracture Property of (110) Single Crystal Silicon
UESUGI, Akio, HIRAI, Yoshikazu, SUGANO, Koji, TSUCHIYA, Toshiyuki, TABATA, OsamuVolume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
DOI:
10.1299/kikaia.79.1191
File:
PDF, 1.64 MB
2013