Effect of Surface Morphology and Crystal Orientations on...

Effect of Surface Morphology and Crystal Orientations on Tensile Fracture Property of (110) Single Crystal Silicon

UESUGI, Akio, HIRAI, Yoshikazu, SUGANO, Koji, TSUCHIYA, Toshiyuki, TABATA, Osamu
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Volume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
DOI:
10.1299/kikaia.79.1191
File:
PDF, 1.64 MB
2013
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