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Finite Element Analysis Using Hierarchal Decomposition for Interaction of Structural, Fluidic and Electrostatic Fields in MEMS Structural Components
ISHIHARA, Daisuke, HORIE, Tomoyoshi, NIHO, Tomoya, BABA, AkiyoshiVolume:
79
Year:
2013
Journal:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
DOI:
10.1299/kikaia.79.1291
File:
PDF, 1.66 MB
2013