Performance of spiral grooves on a rotor of turbomolecular pump.
NANBU, Kenichi, KUBOTA, Haruhiko, IGARASHI, Saburo, URANO, Chiaki, ENOSAWA, HidekiVolume:
57
Year:
1991
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.57.172
File:
PDF, 481 KB
1991