Effects of Target Erosion on the Growth Rate of Films Fabricated by the Sputtering Method.
NANBU, Kenichi, MORIMOTO, Tamotsu, GOTO, YuichiVolume:
57
Year:
1991
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.57.3426
File:
PDF, 581 KB
1991