Effects of Target Erosion on the Growth Rate of Films...

Effects of Target Erosion on the Growth Rate of Films Fabricated by the Sputtering Method.

NANBU, Kenichi, MORIMOTO, Tamotsu, GOTO, Yuichi
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Volume:
57
Year:
1991
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.57.3426
File:
PDF, 581 KB
1991
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