Study on the performance of turbomolecular pumps. 2nd Report, the analysis of the performance in the multiple stages.
SEKIYA, Shin, KITORA, YoshihisaVolume:
57
Year:
1991
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.57.581
File:
PDF, 718 KB
1991