New Plasma Diagnosis Using Langmuir Electrical Probes with...

New Plasma Diagnosis Using Langmuir Electrical Probes with Compensation for Time Dependent Sheath Characteristics. Application of Cylindrical Probes to Weakly Ionized Plasma Fields.

Kato, Seizo, Suzuki, Takashi
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Volume:
60
Year:
1994
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.60.4102
File:
PDF, 693 KB
1994
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