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New Plasma Diagnosis Using Langmuir Electrical Probes with Compensation for Time Dependent Sheath Characteristics. Application of Cylindrical Probes to Weakly Ionized Plasma Fields.
Kato, Seizo, Suzuki, TakashiVolume:
60
Year:
1994
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.60.4102
File:
PDF, 693 KB
1994