Acceleration of CVD Step Coverage Simulation Applied to DSMC Method.
TATSUTA, Shin'ichi, SATO, Yuusuke, TAMAOKI, Naoki, EGASHIRA, Yasuyuki, KOMIYAMA, HiroshiVolume:
62
Year:
1996
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.62.3323
File:
PDF, 729 KB
1996