Analysis of the Effect of Gas Convection on Temperature...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B 2001 Vol. 67; Iss. 656

Analysis of the Effect of Gas Convection on Temperature Distribution in a Wafer during Rapid Thermal Processing with Lamp Heaters.

HIRASAWA, Shigeki, SUZUKI, Tadashi, MARUYAMA, Shigenao, TAKEUCHI, Yuhei
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Volume:
67
Year:
2001
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.67.1035
File:
PDF, 1.24 MB
2001
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