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Effect of Blade Surface Roughness on the Pumping Performance of Turbomolecular Pumps
YABUKI, Masuhisa, SAWADA, Tadashi, SUGIYAMA, Wataru, HARADA, Saori, WATANABE, MitsunoriVolume:
69
Year:
2003
Journal:
Transactions of the Japan Society of Mechanical Engineers Series B
DOI:
10.1299/kikaib.69.1187
File:
PDF, 643 KB
2003