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Optical detecting method of edge position with a Gaussian laser beam. Theoretical analysis and a fundamental detecting apparatus.
YAMADA, Ryuichi, YANAGI, Kazuhisa, YANASE, KatsunoriVolume:
57
Year:
1991
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.57.118
File:
PDF, 583 KB
1991