Experimental and Numerical Analyses of Change in Shape of...

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 1991 Vol. 57; Iss. 542

Experimental and Numerical Analyses of Change in Shape of Vacuum Chuck Surface due to Centrifugal Force.

YOKOYAMA, Kazuhiro, KOBAYASHI, Keiji, MORIWAKI, Toshimichi, SUZUKI, Kenji
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
57
Year:
1991
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.57.3280
File:
PDF, 622 KB
1991
Conversion to is in progress
Conversion to is failed