Optical Stylus using Periodically Vibrating Objective Lens.

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C 1992 Vol. 58; Iss. 554

Optical Stylus using Periodically Vibrating Objective Lens.

KAMADA, Osamu, MOCHIZUKI, Koichi, KIYONO, Satoshi, SATOH, Matsuo, SHIRAISHI, Hikoichi
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Volume:
58
Year:
1992
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.58.3123
File:
PDF, 543 KB
1992
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