Manufacturing of Microstructures Using UV-Sensitive Photopolymer. 4th Report. Manufacturing of 3-Dimensional Microstructures by Writing with a Focused Beam.
NAKAMOTO, Takeshi, YAMAGUCHI, Katsumi, ABRAHA, Petros, ITO, Akira, MISHIMA, KunihiroVolume:
62
Year:
1996
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.62.677
File:
PDF, 626 KB
1996