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Electrostatic Linear Microactuator with Vibrating Motion
KOGA, Akihiro, SUZUMORI, Koichi, MIYAGAWA, Toyomi, SEKIMURA, MasayukiVolume:
63
Year:
1997
Language:
english
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.63.2017
File:
PDF, 3.98 MB
english, 1997