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Intelligent Material and Fluid Systems. Large Scale Active Microvibration Control System Using Piezoelectric Actuators Applied to Semiconductor Manufacturing Equipment.
KAJIWARA, Kouichi, HAYATU, Masaki, IMAOKA, Sizuo, FUJITA, TakafumiVolume:
63
Year:
1997
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.63.3735
File:
PDF, 936 KB
1997