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Study on Nano-machining Process Using Mechanism of a Friction Force Microscope. 1st Report. Trial Production of Nano-machining and Measurement System Modified a FFM.
ASHIDA, Kiwamu, MORITA, Noboru, YOSHIDA, YoshitaroVolume:
64
Year:
1998
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.64.4072
File:
PDF, 1.13 MB
1998