Active Microvibration Control of Precision Manufacturing Facilities with Smart Structure Using Piezoelectric Actuator.
FUJITA, Takafumi, ENOMOTO, Masahito, ARIKABE, Takeo, OGAWA, Tomohiro, MURAI, Nobuyoshi, HASHIMOTO, Yoshiyuki, HAMAGUCHI, Hiroki, KAJIWARA, KoichiVolume:
66
Year:
2000
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.66.2122
File:
PDF, 914 KB
2000