Development of Measuring Method for Shape and Dimension of Micro-components. Modification to the Original Measuring System, Calibration of the Probes and the Results of Dimensional Measurements.
SHIRAMATSU, Toshiya, KITANO, Kenichi, KAWADA, Masayoshi, MITSUI, KimiyukiVolume:
68
Year:
2002
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.68.2783
File:
PDF, 999 KB
2002