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3D Micro-Fabrication using Combination Technique of Nano-Scale Processing and Chemical Etching(1st Report, Possibility of 3D Micro-Fabrication using the Mechanism of Friction Force Microscope)
KAWASEGI, Noritaka, MORITA, Noboru, YAMADA, Shigeru, TAKANO, Noboru, OYAMA, Tatsuo, ASHIDA, KiwamuVolume:
70
Year:
2004
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.70.2533
File:
PDF, 9.98 MB
2004