3D Micro-Fabrication using Combination Technique of Nano-scale Processing and Chemical Etching (3rd Report, Dependence of Enhanced Etching Effect on FIB Processing Conditions and Application to 3D Micro-Fabrication)
KAWASEGI, Noritaka, MORITA, Noboru, YAMADA, Shigeru, TAKANO, Noboru, OYAMA, Tatsuo, ASHIDA, Kiwamu, TANIGUCHI, Jun, MIYAMOTO, IwaoVolume:
71
Year:
2005
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.71.1754
File:
PDF, 9.92 MB
2005