Arbitrary Thermal History Control of Wafer in Photo Resist...

Arbitrary Thermal History Control of Wafer in Photo Resist Processing Using Integrated Heating and Cooling Plate

BANDOH, Kenichi, MINONISHI, Mikio, YOKOTA, Shinichi
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Volume:
71
Year:
2005
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.71.221
File:
PDF, 3.11 MB
2005
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