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Arbitrary Thermal History Control of Wafer in Photo Resist Processing Using Integrated Heating and Cooling Plate
BANDOH, Kenichi, MINONISHI, Mikio, YOKOTA, ShinichiVolume:
71
Year:
2005
Journal:
Transactions of the Japan Society of Mechanical Engineers Series C
DOI:
10.1299/kikaic.71.221
File:
PDF, 3.11 MB
2005